M.Sc. (Semester IV) (CBCS) Examination Mar/Apr-2018
Nano-Technology
THIN FILM TECHNOLOGY
Time: 2½ Hours
Max. Marks: 70
Instructions: Part question 1 is compulsory. Answer any four questions from Part II Figures to the right indicate full marks. Answers to the Part I and Part II are to be written in same answer booklet only.
Part I
Q.1

Rewrite the sentence after choosing correct answer from the given alternatives:
07
If the pressure in chamber drops 1 millitorr to 0.001 militorr, the mean free path of gas molecules inside the chamber
Decreases
Increases
Remain same
Cannot be measured
is not a type of gas transfer pump.
Rotary pump
Cryogenic pump
Turbo molecular pump
8 Oil diffusion pump
can be used as roughing pump.
Rotary pump
Cryogenic pump
Turbo molecular pump
8 Oil diffusion pump
Pressure range between below 10-7 Pa is referred as
Low Vacuum
Medium Vacuum
High Vacuum
Ultra high Vacuum
is a pressure gauge working on the principle of ionization of gas molecules.
Pirani
Penning
Barometer
Bourdon
In bonding takes place between interacting surface and surrounding molecules.
Van Der Waal
Hydrogen
Covalent
a and b both
Usually, cryogenic temperature is
Below 0°K
Above room temperature
Below 0°C
Below 100°K
Q.1

Definitions:
07
Physical vapour deposition
Sputtering
LASER
Mean free path
Sticking coefficient
Condensation
Absolute vacuum
Page 2 of 2
SLR-UV-660
Part II
Attempt any four questions from the following:
Q.2
Explain in detail working of rotary pumps.
14
Q.3
Explain deposition parameters and their effects on thin film formation.
14
Q.4
Mention different types of CVD and explain advantages/ disadvantages of CVD over PVD.
14
Q.5
Explain condensation, physisorption and chemisorptions in detail.
14
Q.6
Attempt any two of the following:
14
Explain electron beam evaporation.
Explain ti sublimation pump.
Write short note on APCVD.
Q.7
Attempt any two of the following:
14
Write short note on PLD method of manomaterials synthesis.
Write short note on glow discharge sputtering.
Write short note on pirani gauge.